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  <import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd"/>
  <import namespace="http://fasb.org/us-types/2013-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2013/elts/us-types-2013-01-31.xsd"/>
  <import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd"/>
  <import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd"/>
  <import namespace="http://fasb.org/us-gaap/2013-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2013/elts/us-gaap-2013-01-31.xsd"/>
  <import namespace="http://xbrl.sec.gov/country/2013-01-31" schemaLocation="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd"/>
  <import namespace="http://xbrl.sec.gov/currency/2012-01-31" schemaLocation="http://xbrl.sec.gov/currency/2012/currency-2012-01-31.xsd"/>
  <import namespace="http://xbrl.sec.gov/dei/2013-01-31" schemaLocation="http://xbrl.sec.gov/dei/2013/dei-2013-01-31.xsd"/>
  <import namespace="http://xbrl.sec.gov/exch/2013-01-31" schemaLocation="http://xbrl.sec.gov/exch/2013/exch-2013-01-31.xsd"/>
  <import namespace="http://xbrl.sec.gov/invest/2013-01-31" schemaLocation="http://xbrl.sec.gov/invest/2013/invest-2013-01-31.xsd"/>
  <import namespace="http://xbrl.sec.gov/stpr/2011-01-31" schemaLocation="http://xbrl.sec.gov/stpr/2011/stpr-2011-01-31.xsd"/>
  <element name="AmortizedCostAndFairValueDebtSecuritiesAbstract" id="cohu_AmortizedCostAndFairValueDebtSecuritiesAbstract" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="AvailableForSaleSecuritiesGrossUnrealizedGainAccumulatedInInvestments" id="cohu_AvailableForSaleSecuritiesGrossUnrealizedGainAccumulatedInInvestments" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="instant" xbrli:balance="debit" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="AvailableForSaleSecuritiesGrossUnrealizedLossAccumulatedInInvestments" id="cohu_AvailableForSaleSecuritiesGrossUnrealizedLossAccumulatedInInvestments" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="instant" xbrli:balance="credit" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="BroadcastMicrowaveServicesMember" id="cohu_BroadcastMicrowaveServicesMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="DeferredProfit" id="cohu_DeferredProfit" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="instant" xbrli:balance="credit" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="DocumentAndEntityInformationAbstract" id="cohu_DocumentAndEntityInformationAbstract" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="DumaTechnologyMember" id="cohu_DumaTechnologyMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="EmployeeStockPurchasePlanMember" id="cohu_EmployeeStockPurchasePlanMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="EquityBasedPerformanceStockUnitsMember" id="cohu_EquityBasedPerformanceStockUnitsMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="IntangibleAssetsLineItems" id="cohu_IntangibleAssetsLineItems" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="IntangibleAssetsTable" id="cohu_IntangibleAssetsTable" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrldt:hypercubeItem"/>
  <element name="InventoryCapitalizedAsPropertyPlantAndEquipment" id="cohu_InventoryCapitalizedAsPropertyPlantAndEquipment" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="duration" xbrli:balance="debit" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="IsmecaSemiconductorHoldingSaMember" id="cohu_IsmecaSemiconductorHoldingSaMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="IsmecaTechnologyMember" id="cohu_IsmecaTechnologyMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="MicrowaveCommunicationsEquipmentMember" id="cohu_MicrowaveCommunicationsEquipmentMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="MunicipalSecuritiesMember" id="cohu_MunicipalSecuritiesMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="NumberOfCustomerAccountedForMoreThanTenPercentageOfNetSales" id="cohu_NumberOfCustomerAccountedForMoreThanTenPercentageOfNetSales" type="xbrli:integerItemType" abstract="false" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="PercentageOfConsolidatedNetSalesAttributableToSignificantCustomer" id="cohu_PercentageOfConsolidatedNetSalesAttributableToSignificantCustomer" type="num:percentItemType" abstract="false" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="PercentageOfShareholderReturnAwardTarget" id="cohu_PercentageOfShareholderReturnAwardTarget" type="num:percentItemType" abstract="false" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="RascoTechnologyMember" id="cohu_RascoTechnologyMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="RisksAndUncertaintiesPolicyTextBlock" id="cohu_RisksAndUncertaintiesPolicyTextBlock" type="nonnum:textBlockItemType" abstract="false" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="ScheduleOfGeographicalInformationLineItems" id="cohu_ScheduleOfGeographicalInformationLineItems" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="ScheduleOfGeographicalInformationTable" id="cohu_ScheduleOfGeographicalInformationTable" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrldt:hypercubeItem"/>
  <element name="SemiconductorEquipmentMember" id="cohu_SemiconductorEquipmentMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardMeasurementPeriod" id="cohu_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardMeasurementPeriod" type="xbrli:durationItemType" abstract="false" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPercentageOfSharesAvailableForIssue" id="cohu_ShareBasedCompensationArrangementByShareBasedPaymentAwardPercentageOfSharesAvailableForIssue" type="num:percentItemType" abstract="false" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="SignificantAccountingPoliciesLineItems" id="cohu_SignificantAccountingPoliciesLineItems" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="SignificantAccountingPoliciesTable" id="cohu_SignificantAccountingPoliciesTable" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrldt:hypercubeItem"/>
  <element name="VariableRateDemandNotesMaximumMaturityYear" id="cohu_VariableRateDemandNotesMaximumMaturityYear" type="xbrli:gYearItemType" abstract="false" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
  <element name="VariableRateDemandNotesMember" id="cohu_VariableRateDemandNotesMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" substitutionGroup="xbrli:item"/>
</schema>

