101 - Document - Document and Entity Information link:calculationLink link:presentationLink link:definitionLink 103 - Statement - Consolidated Balance Sheets link:calculationLink link:presentationLink link:definitionLink 104 - Statement - Consolidated Balance Sheets (Parenthetical) link:calculationLink link:presentationLink link:definitionLink 105 - Statement - Consolidated Statements of Operations link:calculationLink link:presentationLink link:definitionLink 106 - Statement - Consolidated Statements of Comprehensive Income (Loss) link:calculationLink link:presentationLink link:definitionLink 107 - Statement - Consolidated Statements of Stockholders Equity link:calculationLink link:presentationLink link:definitionLink 108 - Statement - Consolidated Statements of Stockholders Equity (Parenthetical) link:calculationLink link:presentationLink link:definitionLink 109 - Statement - Consolidated Statements of Cash Flows link:calculationLink link:presentationLink link:definitionLink 110 - Disclosure - Summary of Significant Accounting Policies link:calculationLink link:presentationLink link:definitionLink 111 - Disclosure - Strategic Technology Transactions, Goodwill and Purchased Intangible Assets link:calculationLink link:presentationLink link:definitionLink 112 - Disclosure - Cash, Cash Equivalents and Short-term Investments link:calculationLink link:presentationLink link:definitionLink 113 - Disclosure - Employee Benefit Plans link:calculationLink link:presentationLink link:definitionLink 114 - Disclosure - Income Taxes link:calculationLink link:presentationLink link:definitionLink 115 - Disclosure - Segment and Related Information link:calculationLink link:presentationLink link:definitionLink 116 - Disclosure - Stockholder Rights Plan link:calculationLink link:presentationLink link:definitionLink 117 - Disclosure - Commitments and Contingencies link:calculationLink link:presentationLink link:definitionLink 118 - Disclosure - Guarantees link:calculationLink link:presentationLink link:definitionLink 119 - Disclosure - Related Party Transactions link:calculationLink link:presentationLink link:definitionLink 120 - Disclosure - Accumulated Other Comprehensive Income (Loss) link:calculationLink link:presentationLink link:definitionLink 121 - Disclosure - Quarterly Financial Data link:calculationLink link:presentationLink link:definitionLink 122 - Disclosure - Schedule II Valuation and Qualifying Accounts link:calculationLink link:presentationLink link:definitionLink 123 - Disclosure - Summary of Significant Accounting Policies (Policies) link:calculationLink link:presentationLink link:definitionLink 124 - Disclosure - Summary of Significant Accounting Policies (Tables) link:calculationLink link:presentationLink link:definitionLink 125 - Disclosure - Strategic Technology Transactions, Goodwill and Purchased Intangible Assets (Tables) link:calculationLink link:presentationLink link:definitionLink 126 - Disclosure - Cash, Cash Equivalents and Short-term Investments (Tables) link:calculationLink link:presentationLink link:definitionLink 127 - Disclosure - Employee Benefit Plans (Tables) link:calculationLink link:presentationLink link:definitionLink 128 - Disclosure - Income Taxes (Tables) link:calculationLink link:presentationLink link:definitionLink 129 - Disclosure - Segment and Related Information (Tables) link:calculationLink link:presentationLink link:definitionLink 130 - Disclosure - Commitments and Contingencies (Tables) link:calculationLink link:presentationLink link:definitionLink 131 - Disclosure - Guarantees (Tables) link:calculationLink link:presentationLink link:definitionLink 132 - Disclosure - Accumulated Other Comprehensive Income (Loss) (Tables) link:calculationLink link:presentationLink link:definitionLink 133 - Disclosure - Quarterly Financial Data (Tables) link:calculationLink link:presentationLink link:definitionLink 134 - Disclosure - Summary of Significant Accounting Policies - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 135 - Disclosure - Summary of Significant Accounting Policies - Computation of Basic and Diluted Income (Loss) Per Share (Detail) link:calculationLink link:presentationLink link:definitionLink 136 - Disclosure - Strategic Technology Transactions, Goodwill and Purchased Intangible Assets - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 137 - Disclosure - Strategic Technology Transactions, Goodwill and Purchased Intangible Assets - Allocation of Purchase Price (Detail) link:calculationLink link:presentationLink link:definitionLink 138 - Disclosure - Strategic Technology Transactions, Goodwill and Purchased Intangible Assets - Allocation of Intangible Assets (Detail) link:calculationLink link:presentationLink link:definitionLink 139 - Disclosure - Strategic Technology Transactions, Goodwill and Purchased Intangible Assets - Summary of Pro Forma Financial Information (Detail) link:calculationLink link:presentationLink link:definitionLink 140 - Disclosure - Strategic Technology Transactions, Goodwill and Purchased Intangible Assets - Changes in Carrying Value of Goodwill by Reportable Segment (Detail) link:calculationLink link:presentationLink link:definitionLink 141 - Disclosure - Strategic Technology Transactions, Goodwill and Purchased Intangible Assets - Purchased Intangible Assets, Subject to Amortization (Detail) link:calculationLink link:presentationLink link:definitionLink 142 - Disclosure - Cash, Cash Equivalents and Short-term Investments - Short-Term Investments by Security Type (Detail) link:calculationLink link:presentationLink link:definitionLink 143 - Disclosure - Cash, Cash Equivalents and Short-term Investments - Effective Maturities of Short-Term Investments (Detail) link:calculationLink link:presentationLink link:definitionLink 144 - Disclosure - Cash, Cash Equivalents and Short-term Investments - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 145 - Disclosure - Cash, Cash Equivalents and Short-term Investments - Assets Measured at Fair Value on Recurring Basis (Detail) link:calculationLink link:presentationLink link:definitionLink 146 - Disclosure - Employee Benefit Plans - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 147 - Disclosure - Employee Benefit Plans - Schedule of Net Periodic Benefit Cost of Swiss Plan (Detail) link:calculationLink link:presentationLink link:definitionLink 148 - Disclosure - Employee Benefit Plans - Schedule of Benefit Obligation, Fair Value of Plan Assets, Funded Status and Liability of Swiss Plan (Detail) link:calculationLink link:presentationLink link:definitionLink 149 - Disclosure - Employee Benefit Plans - Schedule of Weighted-Average Actuarial Assumptions to Determine Benefit Obligation and Net Periodic Benefit Cost (Detail) link:calculationLink link:presentationLink link:definitionLink 150 - Disclosure - Employee Benefit Plans - Schedule of Post-Retirement Benefit Obligation to Funded Status and Liability (Detail) link:calculationLink link:presentationLink link:definitionLink 151 - Disclosure - Employee Benefit Plans - Schedule of Stock Option Activity under Share-Based Compensation Plans (Detail) link:calculationLink link:presentationLink link:definitionLink 152 - Disclosure - Employee Benefit Plans - Schedule of Stock Options Outstanding and Exercisable (Detail) link:calculationLink link:presentationLink link:definitionLink 153 - Disclosure - Employee Benefit Plans - Schedule of Restricted Stock Unit Activity under Share-Based Compensation Plans (Detail) link:calculationLink link:presentationLink link:definitionLink 154 - Disclosure - Employee Benefit Plans - Schedule of Performance Based Stock Unit Activity Under Share-Based Compensation Plans (Detail) link:calculationLink link:presentationLink link:definitionLink 155 - Disclosure - Employee Benefit Plans - Schedule of Weighted Average Assumptions to Value Share-Based Awards Granted (Detail) link:calculationLink link:presentationLink link:definitionLink 156 - Disclosure - Employee Benefit Plans - Schedule of Reported Share-Based Compensation in Consolidated Financial Statements (Detail) link:calculationLink link:presentationLink link:definitionLink 157 - Disclosure - Income Taxes - Significant Components of Provision (Benefit) for Income Taxes (Detail) link:calculationLink link:presentationLink link:definitionLink 158 - Disclosure - Income Taxes - Income (Loss) Before Income Taxes (Detail) link:calculationLink link:presentationLink link:definitionLink 159 - Disclosure - Income Taxes - Significant Components of Deferred Tax Assets and Liabilities (Detail) link:calculationLink link:presentationLink link:definitionLink 160 - Disclosure - Income Taxes - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 161 - Disclosure - Income Taxes - Reconciliation of Income Tax Computed at U.S. Federal Statutory Tax Rate to Provision (Benefit) for Income Taxes (Detail) link:calculationLink link:presentationLink link:definitionLink 162 - Disclosure - Income Taxes - Reconciliation of Income Tax Computed at U.S. Federal Statutory Tax Rate to Provision (Benefit) for Income Taxes (Parenthetical) (Detail) link:calculationLink link:presentationLink link:definitionLink 163 - Disclosure - Income Taxes - Reconciliation of Gross Unrecognized Tax Benefits (Detail) link:calculationLink link:presentationLink link:definitionLink 164 - Disclosure - Segment and Related Information - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 165 - Disclosure - Segment and Related Information - Financial Information by Industry Segment (Detail) link:calculationLink link:presentationLink link:definitionLink 166 - Disclosure - Segment and Related Information - Financial Information by Industry Segment (Parenthetical) (Detail) link:calculationLink link:presentationLink link:definitionLink 167 - Disclosure - Segment and Related Information - Summary of Semiconductor Equipment Net Sales (Detail) link:calculationLink link:presentationLink link:definitionLink 168 - Disclosure - Segment and Related Information - Summary of Semiconductor Equipment Net Sales (Parenthetical) (Detail) link:calculationLink link:presentationLink link:definitionLink 169 - Disclosure - Segment and Related Information - Summary of Net Sales to Customers, Attributed to Countries (Detail) link:calculationLink link:presentationLink link:definitionLink 170 - Disclosure - Segment and Related Information - Summary of Property, Plant and Equipment in Geographical Area (Detail) link:calculationLink link:presentationLink link:definitionLink 171 - Disclosure - Stockholder Rights Plan - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 172 - Disclosure - Commitments and Contingencies - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 173 - Disclosure - Commitments and Contingencies - Future Minimum Lease Payments (Detail) link:calculationLink link:presentationLink link:definitionLink 174 - Disclosure - Guarantees - Changes in Accrued Warranty (Detail) link:calculationLink link:presentationLink link:definitionLink 175 - Disclosure - Guarantees - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 176 - Disclosure - Related Party Transactions - Additional Information (Detail) link:calculationLink link:presentationLink link:definitionLink 177 - Disclosure - Accumulated Other Comprehensive Income (Loss) - Components of Other Comprehensive Income (Loss) (Detail) link:calculationLink link:presentationLink link:definitionLink 178 - Disclosure - Accumulated Other Comprehensive Income (Loss) - Components of Accumulated Other Comprehensive Income, Net of Tax (Detail) link:calculationLink link:presentationLink link:definitionLink 179 - Disclosure - Quarterly Financial Data - Summary of Quarterly Financial Data (Detail) link:calculationLink link:presentationLink link:definitionLink 180 - Disclosure - Schedule II Valuation and Qualifying Accounts (Detail) link:calculationLink link:presentationLink link:definitionLink 181 - Disclosure - Schedule II Valuation and Qualifying Accounts (Parenthetical) (Detail) link:calculationLink link:presentationLink link:definitionLink