Accounting Policies [Abstract] Accounting Policies [Abstract] Accounts and Other Receivables, Net, Current Accounts receivable, net Accounts Payable, Current Accounts payable Accrued Income Taxes, Current Income taxes payable Accrued Income Taxes, Noncurrent Noncurrent income tax liabilities Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment Less accumulated depreciation and amortization Accumulated Other Comprehensive Income (Loss), Net of Tax Accumulated other comprehensive income (loss) Additional Paid in Capital, Common Stock Paid-in capital Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract] Adjustments to reconcile net income (loss) to net cash provided by operating activities: Allocated Share-based Compensation Expense, Net of Tax Total share-based compensation, net Allowance for Doubtful Accounts Receivable, Current Net of allowance for doubtful accounts Amendment Flag Amendment Flag Amortization of Intangible Assets Amortization expense related to purchased intangible assets Amortized Cost and Fair Value Debt Securities [Abstract] Amortized Cost and Fair Value Debt Securities [Abstract] Amortized Cost and Fair Value Debt Securities [Abstract] Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount Number of common stock shares excluded from computation of diluted income per share Assets Total consolidated assets Assets [Abstract] ASSETS Assets, Current Total current assets Assets, Current [Abstract] Current assets: Assets of Disposal Group, Including Discontinued Operation Total assets Assets of Disposal Group, Including Discontinued Operation [Abstract] Assets: Assets of Disposal Group, Including Discontinued Operation, Current Current assets of discontinued video camera segment (Note 2) Total current assets Available-for-sale Securities Total estimated fair value Available-for-sale Securities, Amortized Cost Basis Amortized Cost Available-for-sale Securities, Continuous Unrealized Loss Position [Abstract] Available-for-sale Securities, Continuous Unrealized Loss Position [Abstract] Available-for-sale Securities, Current Short-term investments Estimated Fair Value Available-for-sale Securities, Debt Maturities, Next Twelve Months, Amortized Cost Basis Due in one year or less, Amortized Cost Securities amortized cost, Due in one year or less Available-for-sale Securities, Debt Maturities, Next Twelve Months, Fair Value Due in one year or less, Estimated Fair Value Securities fair value, Due in one year or less Amount of accumulated pre-tax unrealized gain before deducting pre-tax unrealized losses on investments in available-for-sale securities impacting investments. Available For Sale Securities, Gross Unrealized Gain Accumulated In Investments Gross Unrealized Gains Amount of accumulated pre-tax unrealized loss before deducting pre-tax unrealized gain on investments in available-for-sale securities impacting investments. Available For Sale Securities Gross Unrealized Loss Accumulated In Investments Gross Unrealized Losses Available-for-sale Securities [Table Text Block] Short-Term Investments by Security Type Award Type [Axis] Award Type [Axis] Basis of Presentation and Significant Accounting Policies [Text Block] Basis of Presentation Broadcast Microwave Services. Broadcast Microwave Services [Member] Broadcast Microwave Services [Member] Buildings and Improvements, Gross Buildings and building improvements Business Acquisition, Acquiree [Domain] Business Acquisition, Acquiree [Domain] Business Acquisition [Axis] Business Acquisition [Axis] Cash and Cash Equivalents, at Carrying Value Cash and cash equivalents at end of period Cash and cash equivalents at beginning of period Cash and cash equivalents Cash and Cash Equivalents, Period Increase (Decrease) Net increase (decrease) in cash and cash equivalents Cash [Member] Cash [Member] Cash Provided by (Used in) Investing Activities, Discontinued Operations Investing cash flows of discontinued operations Cash Provided by (Used in) Operating Activities, Discontinued Operations Operating cash flows of discontinued operations Certificates of Deposit [Member] Bank Certificates of Deposit [Member] Commitments and Contingencies Commitments and contingencies Commitments and Contingencies Disclosure [Abstract] Commitments and Contingencies Disclosure [Abstract] Commitments Contingencies and Guarantees [Text Block] Guarantees Common Stock, Capital Shares Reserved for Future Issuance Shares available for future issuance Common Stock, Dividends, Per Share, Declared Cash dividends declared per share Common Stock, Par or Stated Value Per Share Common stock, par value Common Stock, Shares Authorized Common stock, shares authorized Common Stock, Shares, Issued Common stock, shares issued Common Stock, Shares, Outstanding Common stock, shares outstanding Common Stock, Value, Issued Common stock, $1 par value; 60,000 shares authorized, 25,535 shares issued and outstanding in 2014 and 25,080 shares in 2013 Comprehensive Income (Loss), Net of Tax, Attributable to Parent Comprehensive loss Cost of Goods and Services Sold Cost of sales Cost of Sales [Member] Cost of Sales [Member] Costs and Expenses Total cost and expenses Costs and Expenses [Abstract] Cost and expenses: Current Fiscal Year End Date Current Fiscal Year End Date Debt Security [Axis] Debt Security [Axis] Deferred Income Tax Expense (Benefit) Deferred income taxes The carrying value of deferred revenue, net of expenses, as of the balance sheet date that is expected to be recognized as such within one year or the normal operating cycle, if longer. Deferred Profit Deferred profit Deferred Revenue Deferred revenue Deferred Tax Assets, Net of Valuation Allowance, Current Deferred income taxes Deferred Tax Liabilities, Net, Noncurrent Deferred income taxes Depreciation, Depletion and Amortization Depreciation and amortization Disclosure of Compensation Related Costs, Share-based Payments [Abstract] Disclosure of Compensation Related Costs, Share-based Payments [Abstract] Disclosure of Compensation Related Costs, Share-based Payments [Text Block] Employee Stock Benefit Plans Discontinued Operation, Amounts of Material Contingent Liabilities Remaining Contingent consideration from sale of video camera segment Discontinued Operation, Gain (Loss) on Disposal of Discontinued Operation, Net of Tax Gain on disposal of video camera segment Gain on disposal of video camera segment Discontinued Operation, Income (Loss) from Discontinued Operation During Phase-out Period, Net of Tax Operating income (loss) before income taxes Discontinued Operations and Disposal Groups [Abstract] Discontinued Operations and Disposal Groups [Abstract] Discontinued Operations, Policy [Policy Text Block] Discontinued Operations Discontinued Operation, Tax Effect of Income (Loss) from Discontinued Operation During Phase-out Period Income tax provision Disposal Group, Including Discontinued Operation, Accounts, Notes and Loans Receivable, Net Accounts receivable, net Disposal Group, Including Discontinued Operation, Accounts Payable Accounts payable Disposal Group, Including Discontinued Operation, Accrued Liabilities Other accrued current liabilities Disposal Group, Including Discontinued Operation, Balance Sheet Disclosures [Abstract] Disposal Group, Including Discontinued Operation, Balance Sheet Disclosures [Abstract] Disposal Group, Including Discontinued Operation, Inventory Inventories Disposal Group, Including Discontinued Operation, Other Current Assets Other current assets Disposal Group, Including Discontinued Operation, Other Expense Divestiture-related costs Disposal Group, Including Discontinued Operation, Property, Plant, and Equipment, Net Noncurrent assets of discontinued video camera segment (Note 2) Property, plant and equipment, net Disposal Group, Including Discontinued Operation, Revenue Net sales Disposal Groups, Including Discontinued Operations, Disclosure [Text Block] Disposal of Video Camera Segment Dividends Payable Dividends declared but not yet paid Document And Entity Information [Abstract] Document And Entity Information [Abstract] Document And Entity Information [Abstract] Document Fiscal Period Focus Document Fiscal Period Focus Document Fiscal Year Focus Document Fiscal Year Focus Document Period End Date Document Period End Date Document Type Document Type Duma Technology [Member] Duma Technology [Member] Duma Technology [Member] Earnings Per Share [Abstract] Earnings Per Share [Abstract] Earnings Per Share, Basic Net income (loss) Earnings Per Share, Basic [Abstract] Basic: Earnings Per Share, Basic and Diluted [Abstract] Income (loss) per share: Earnings Per Share, Diluted Net income (loss) Earnings Per Share, Diluted [Abstract] Diluted: Earnings Per Share, Policy [Policy Text Block] Income (Loss) Per Share Effective Income Tax Rate Reconciliation, Percent Effective tax rate on income or loss from continuing operations Effect of Exchange Rate on Cash and Cash Equivalents Effect of exchange rate changes on cash and cash equivalents Employee-related Liabilities, Current Accrued compensation and benefits Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] Employee Service Share-based Compensation, Tax Benefit from Compensation Expense Income tax benefit Employee Severance [Member] Severance and Other Payroll [Member] Employee Stock Option [Member] Employee Stock Options [Member] Employee stock purchase plan. Employee Stock Purchase Plan [Member] Employee Stock Purchase Plan [Member] Entity Central Index Key Entity Central Index Key Entity Common Stock, Shares Outstanding Entity Common Stock, Shares Outstanding Entity [Domain] Entity [Domain] Entity Filer Category Entity Filer Category Entity Registrant Name Entity Registrant Name Equity based performance stock units. Equity Based Performance Stock Units [Member] Equity-Based Performance Stock Units [Member] Executive Officer [Member] Senior Executives [Member] Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] Fair Value Measurements, Recurring and Nonrecurring [Table] Fair Value Measurements, Recurring and Nonrecurring [Table] Fair Value, Assets Measured on Recurring Basis [Table Text Block] Assets Measured at Fair Value on Recurring Basis Asset Class [Domain] Asset Class [Domain] Asset Class [Axis] Asset Class [Axis] Fair Value, Hierarchy [Axis] Fair Value, Hierarchy [Axis] Fair Value Disclosures [Abstract] Fair Value Disclosures [Abstract] Fair Value, Inputs, Level 1 [Member] Level 1 [Member] Fair Value, Inputs, Level 2 [Member] Level 2 [Member] Fair Value, Measurement Inputs, Disclosure [Text Block] Financial Instruments Measured at Fair Value Fair Value Hierarchy [Domain] Fair Value Hierarchy [Domain] Finite-Lived Intangible Assets, Accumulated Amortization Accumulated Amortization Finite-Lived Intangible Assets by Major Class [Axis] Finite-Lived Intangible Assets by Major Class [Axis] Finite-Lived Intangible Assets, Gross Gross Carrying Amount Finite-Lived Intangible Assets [Line Items] Finite-Lived Intangible Assets [Line Items] Finite-Lived Intangible Assets, Major Class Name [Domain] Finite-Lived Intangible Assets, Major Class Name [Domain] Finite-Lived Intangible Asset, Useful Life Remaining Useful Life Goodwill Goodwill Goodwill Goodwill Goodwill, Acquired During Period Additions net of adjustments Goodwill and Intangible Asset Impairment Goodwill impairment Goodwill and Intangible Assets Disclosure [Abstract] Goodwill and Intangible Assets Disclosure [Abstract] Goodwill and Intangible Assets Disclosure [Text Block] Goodwill and Other Purchased Intangible Assets Goodwill and Intangible Assets, Intangible Assets, Policy [Policy Text Block] Goodwill, Other Intangible Assets and Long-lived Assets Goodwill, Translation Adjustments Impact of currency exchange Guarantor Obligations, Maximum Exposure, Undiscounted Maximum potential amount of future payments under standby letters of credit Guarantees [Abstract] Guarantees [Abstract] Income (Loss) from Continuing Operations Attributable to Parent Income (loss) from continuing operations Income (Loss) from Continuing Operations before Income Taxes, Extraordinary Items, Noncontrolling Interest Profit (loss) for reportable segments Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest Income (loss) from continuing operations before taxes Income (Loss) from Continuing Operations, Per Basic Share Income (loss) from continuing operations Income (Loss) from Continuing Operations, Per Diluted Share Income (loss) from continuing operations Income (Loss) from Discontinued Operations, Net of Tax, Including Portion Attributable to Noncontrolling Interest Income from discontinued operations, net of tax Income from discontinued operations, net of taxes Income (Loss) from Discontinued Operations and Disposal of Discontinued Operations, Net of Tax, Per Basic Share Income from discontinued operations, net of tax Income (Loss) from Discontinued Operations and Disposal of Discontinued Operations, Net of Tax, Per Diluted Share Income from discontinued operations, net of tax Income Statement [Abstract] Income Statement [Abstract] Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items] Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items] Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Table] Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Table] Income Statement Location [Axis] Income Statement Location [Axis] Income Statement Location [Domain] Income Statement Location [Domain] Income Tax Disclosure [Abstract] Income Tax Disclosure [Abstract] Income Tax Disclosure [Text Block] Income Taxes Income Taxes Paid, Net Cash paid (refunded) for income taxes Income Tax Expense (Benefit) Income tax provision (benefit) Increase (Decrease) in Accounts Payable Accounts payable Increase (Decrease) in Accounts Receivable Accounts receivable Increase (Decrease) in Income Taxes Payable Income taxes payable, including excess stock option exercise benefit Increase (Decrease) in Accrued Liabilities Accrued compensation, warranty and other liabilities Increase (Decrease) in Deferred Revenue Deferred profit Increase (Decrease) in Inventories Inventories Increase (Decrease) in Operating Capital [Abstract] Changes in current assets and liabilities, excluding effects from acquisitions and divestitures: Increase (Decrease) in Other Accrued Liabilities Other accrued liabilities Increase (Decrease) in Other Operating Assets Other current assets Indefinite-lived Intangible Assets [Axis] Indefinite-lived Intangible Assets [Axis] Indefinite-Lived Intangible Assets (Excluding Goodwill) Amounts excluded related to trade names Indefinite-lived Intangible Assets, Major Class Name [Domain] Indefinite-lived Intangible Assets, Major Class Name [Domain] Intangible Assets [Line Items] Intangible Assets [Line Items] Intangible Assets [Line Items] Intangible Assets, Net (Excluding Goodwill) Intangible assets, net Intangible Assets [Table] Intangible Assets [Table] Intangible Assets [Table] Inventory capitalized as property, plant and equipment Inventory Capitalized As Property Plant And Equipment Inventory capitalized as property, plant and equipment Inventory, Finished Goods, Net of Reserves Finished goods Inventory, Net Total inventories Inventory, Net [Abstract] Inventories: Inventory, Raw Materials and Purchased Parts, Net of Reserves Raw materials and purchased parts Inventory, Work in Process, Net of Reserves Work in process Investment Income, Net Interest and other, net Investments Classified by Contractual Maturity Date [Table Text Block] Effective Maturities of Short-Term Investments Investments, Debt and Equity Securities [Abstract] Investments, Debt and Equity Securities [Abstract] Investment Type [Axis] Investment Type [Axis] Investments [Domain] Investments [Domain] Ismeca Semiconductor Holding Sa [Member] Ismeca Semiconductor Holding Sa [Member] Ismeca [Member] Ismeca Technology [Member] Ismeca Technology [Member] Ismeca Technology [Member] Land and Land Improvements Land and land improvements Legal Entity [Axis] Legal Entity [Axis] Liabilities and Equity Total liabilities and stockholders' equity Liabilities and Equity [Abstract] LIABILITIES AND STOCKHOLDERS' EQUITY Liabilities, Current Total current liabilities Liabilities, Current [Abstract] Current liabilities: Liabilities of Disposal Group, Including Discontinued Operation [Abstract] Liabilities: Liabilities of Disposal Group, Including Discontinued Operation, Current Current liabilities of discontinued video camera segment (Note 2) Total liabilities Contingencies Disclosure [Text Block] Contingencies Machinery and Equipment, Gross Machinery and equipment Major Types of Debt and Equity Securities [Axis] Major Types of Debt and Equity Securities [Axis] Major Types of Debt and Equity Securities [Domain] Major Types of Debt and Equity Securities [Domain] Major Types of Debt Securities [Domain] Major Types of Debt Securities [Domain] Maximum [Member] Maximum [Member] Microwave communications equipment as a business segment. Microwave Communications Equipment [Member] Microwave Communications Equipment [Member] Minimum [Member] Minimum [Member] Money Market Funds [Member] Money Market Funds [Member] Municipal Securities Member Municipal Securities [Member] Municipal Securities [Member] Net Cash Provided by (Used in) Financing Activities [Abstract] Cash flows from financing activities: Net Cash Provided by (Used in) Financing Activities, Continuing Operations Net cash used in financing activities Net Cash Provided by (Used in) Investing Activities, Continuing Operations Net cash provided by (used in) investing activities Net Cash Provided by (Used in) Investing Activities, Continuing Operations [Abstract] Cash flows from investing activities, excluding effects from acquisitions and divestitures: Net Cash Provided by (Used in) Operating Activities Net cash provided by operating activities Net Cash Provided by (Used in) Operating Activities [Abstract] Cash flows from operating activities: Net Income (Loss) Attributable to Parent Net income (loss) Net income (loss) New Accounting Pronouncements, Policy [Policy Text Block] Recent Accounting Pronouncements Number of customer accounted for more than 10 percentage of Net sales. Number Of Customer Accounted For More Than Ten Percentage Of Net Sales Customers individually accounting for more than 10% of consolidated net sales Operating Income (Loss) Income (loss) from operations Other Accrued Liabilities, Current Other accrued liabilities Other Assets, Noncurrent Other assets Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax Foreign currency translation adjustments Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent Other comprehensive income (loss), net of tax Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent [Abstract] Other comprehensive income (loss), net of tax Other Comprehensive (Income) Loss, Pension and Other Postretirement Benefit Plans, Adjustment, Net of Tax Adjustments related to postretirement benefits Other Comprehensive Income (Loss), Unrealized Holding Gain (Loss) on Securities Arising During Period, Net of Tax Change in unrealized gain/loss on investments Other General and Administrative Expense Corporate expenses Payments for (Proceeds from) Other Investing Activities Other assets Payments for Restructuring Amounts paid or charged Payments of Ordinary Dividends, Common Stock Cash dividends paid Payments to Acquire Businesses, Net of Cash Acquired Payment for purchase of Ismeca, net of cash received Payments to Acquire Property, Plant, and Equipment Purchases of property, plant and equipment Pension and Other Postretirement Plans, Policy [Policy Text Block] Retiree Medical Benefits Percentage of consolidated net sales attributable to significant customer. Percentage Of Consolidated Net Sales Attributable To Significant Customer Percentage of consolidated net sales Percentage Of Shareholder Return Award Target Percentage Of Shareholder Return Award Target Shareholders return adjustment range Postemployment Benefits Liability, Noncurrent Accrued retirement benefits Preferred Stock, Par or Stated Value Per Share Preferred stock, par value Preferred Stock, Shares Authorized Preferred stock, shares authorized Preferred Stock, Shares Issued Preferred stock, shares issued Preferred Stock, Value, Issued Preferred stock, $1 par value; 1,000 shares authorized, none issued Prepaid Expense and Other Assets, Current Other current assets Proceeds from Divestiture of Businesses Cash received from sale of video camera segment Proceeds from (Repurchase of) Equity Issuance of stock, net of repurchases Proceeds from Sale and Maturity of Available-for-sale Securities Sales and maturities of short-term investments Product Warranties Disclosures [Abstract] Product Warranties Disclosures [Abstract] Product Warranty Accrual, Additions from Business Acquisition Warranty liability assumed Product Warranty Accrual, Current Balance at end of period Balance at beginning of period Accrued warranty Product Warranty Accrual, Payments Warranty payments Product Warranty Accrual, Warranties Issued Warranty expense accruals Property, Plant and Equipment, Gross Property plant and equipment, gross Property, Plant and Equipment, Net Net property, plant and equipment Property, Plant and Equipment, Net [Abstract] Property, plant and equipment, at cost: Range [Axis] Range [Axis] Range [Domain] Range [Domain] Rasco technology. Rasco Technology [Member] Rasco Technology [Member] Reorganizations [Abstract] Reorganizations [Abstract] Reporting Unit, Percentage of Fair Value in Excess of Carrying Amount Percent of fair value exceeding carrying value Research and Development Expense Research and development Research and Development Expense [Member] Research and Development [Member] Restricted Stock Units (RSUs) [Member] Restricted Stock Units [Member] Restructuring and Related Activities [Abstract] Restructuring and Related Activities [Abstract] Restructuring and Related Activities Disclosure [Text Block] Geographic Consolidation Restructuring Charges Costs accrued Severance and one time termination benefits Restructuring Type [Axis] Restructuring Type [Axis] Restructuring Cost and Reserve [Line Items] Restructuring Cost and Reserve [Line Items] Restructuring Reserve Ending balance Beginning balance Restructuring Reserve, Translation Adjustment Impact of currency exchange Retained Earnings (Accumulated Deficit) Retained earnings Revenue Recognition, Policy [Policy Text Block] Revenue Recognition Risks and uncertainties. Risks And Uncertainties Policy [Text Block] Risks and Uncertainties Revenue, Net Consolidated net sales for reportable segments Net sales Schedule of Available-for-sale Securities [Line Items] Schedule of Available-for-sale Securities [Line Items] Schedule of Available-for-sale Securities [Table] Schedule of Available-for-sale Securities [Table] Schedule of Disposal Groups, Including Discontinued Operations, Income Statement, Balance Sheet and Additional Disclosures [Table Text Block] Summary of Balance Sheet Information and Operating Results of Discontinued Video Camera Segment Schedule of Earnings Per Share, Basic and Diluted [Table Text Block] Computation of Basic and Diluted Income (Loss) Per Share Schedule of Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Table] Schedule of Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Table] Schedule of Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Table Text Block] Schedule of Reported Share-Based Compensation in Condensed Consolidated Interim Financial Statements Schedule of Finite-Lived Intangible Assets [Table] Schedule of Finite-Lived Intangible Assets [Table] Schedule of Finite-Lived Intangible Assets [Table Text Block] Purchased Intangible Assets, Subject to Amortization Schedule Of Geographical Information [Line Items] Schedule Of Geographical Information [Line Items] Schedule Of Geographical Information [Line Items] Schedule Of Geographical Information [Table] Schedule Of Geographical Information [Table] Schedule Of Geographical Information [Table] Schedule of Goodwill [Table Text Block] Changes in Carrying Value of Goodwill by Reportable Segment Schedule of Product Warranty Liability [Table Text Block] Changes in Accrued Warranty Schedule of Restructuring and Related Costs [Table] Schedule of Restructuring and Related Costs [Table] Restructuring and Related Costs [Table Text Block] Summary of Reconciliation of Amounts Accrued and Paid Under Consolidation Plan Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block] Schedule of Customer Concentration to Consolidated Net Sales Schedule of Segment Reporting Information, by Segment [Table] Schedule of Segment Reporting Information, by Segment [Table] Schedule of Segment Reporting Information, by Segment [Table Text Block] Financial Information by Industry Segment Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table] Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table] Segments [Domain] Segments [Domain] Segment Reporting [Abstract] Segment Reporting [Abstract] Segment Reporting Disclosure [Text Block] Industry Segments Segment Reporting Information, Additional Information [Abstract] Other unallocated amounts: Segment Reporting Information [Line Items] Segment Reporting Information [Line Items] Segment Reporting Information, Profit (Loss) [Abstract] Segment profit (loss): Segment Reporting Information, Revenue for Reportable Segment [Abstract] Net sales by segment: Selling, General and Administrative Expense Selling, general and administrative Selling, General and Administrative Expenses [Member] Selling, General and Administrative [Member] Semiconductor equipment as a business segment. Semiconductor Equipment [Member] Semiconductor Equipment [Member] Share-based Compensation Share-based compensation expense Total share-based compensation Share based compensation arrangement by share based payment award award measurement period. Share Based Compensation Arrangement By Share Based Payment Award Award Measurement Period Award measurement period Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period Maximum period in which vested stock become exercisable Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Rights, Percentage Rate of shares vest Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period Number of common share granted Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number Units outstanding Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Outstanding, Weighted Average Remaining Contractual Terms Weighted average remaining vesting period Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period Range of period in which vested stock expire Share-based Compensation Arrangement by Share-based Payment Award [Line Items] Share-based Compensation Arrangement by Share-based Payment Award [Line Items] Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant Shares available for equity grants Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value Aggregate intrinsic value of stock options, Exercisable Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number Stock options outstanding, Exercisable Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price Weighted-average exercise price of stock options, Exercisable Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term Weighted average remaining contractual term stock options, Exercisable Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value Aggregate intrinsic value of stock options Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number Stock options outstanding Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price Weighted-average exercise price of stock options Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term Weighted average remaining contractual term stock options Share based compensation arrangement by share based payment award percentage of shares available for issue. Share Based Compensation Arrangement By Share Based Payment Award Percentage Of Shares Available For Issue Common stock granted on achievement of performance goals Share-based Compensation Arrangement by Share-based Payment Award, Purchase Price of Common Stock, Percent Percentage of fair value of common stock, common stock price Share-based Compensation Arrangement by Share-based Payment Award, Shares Issued in Period Number of stock units awarded Equity Award [Domain] Equity Award [Domain] Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block] Share-Based Compensation Significant Accounting Policies [Line Items] Significant Accounting Policies [Line Items] Significant Accounting Policies [Line Items] Significant Accounting Policies [Table] Significant Accounting Policies [Table] Significant Accounting Policies [Table] Significant Accounting Policies [Text Block] Summary of Significant Accounting Policies Standard Product Warranty Description Product warranty period Segments [Axis] Segments [Axis] Statement of Cash Flows [Abstract] Statement of Cash Flows [Abstract] Statement of Financial Position [Abstract] Statement of Financial Position [Abstract] Statement of Comprehensive Income [Abstract] Statement of Income and Comprehensive Income [Abstract] Stockholders' Equity Attributable to Parent Total stockholders' equity Stockholders' Equity Attributable to Parent [Abstract] Stockholders' equity: Stockholders' Equity, Policy [Policy Text Block] Comprehensive Income (Loss) Stock Issued During Period, Shares, Employee Stock Purchase Plans Shares issued under Employee Stock Purchase Plan Subsequent Event [Member] Subsequent Event [Member] Subsequent Event Type [Axis] Subsequent Event Type [Axis] Subsequent Event Type [Domain] Subsequent Event Type [Domain] Supplemental Cash Flow Information [Abstract] Supplemental disclosure of cash flow information: Title of Individual [Axis] Title of Individual [Axis] Relationship to Entity [Domain] Relationship to Entity [Domain] Trade and Other Accounts Receivable, Policy [Policy Text Block] Concentration of Credit Risk Trading Symbol Trading Symbol Type of Restructuring [Domain] Type of Restructuring [Domain] Unrecognized Tax Benefits, Period Increase (Decrease) Change in unrecognized tax benefit and interest accrued Variable rate demand notes maximum maturity year. Variable Rate Demand Notes Maximum Maturity Year Variable rate demand notes maturity year Variable Rate Demand Notes [Member] Variable Rate Demand Notes [Member] Variable Rate Demand Notes [Member] Weighted Average Number Diluted Shares Outstanding Adjustment Effect of dilutive stock options Weighted Average Number of Shares Outstanding, Diluted Diluted Weighted average diluted shares used in computing income (loss) per share Weighted Average Number of Shares Outstanding, Diluted [Abstract] Weighted average shares used in computing income (loss) per share: Weighted Average Number of Shares Outstanding, Basic Basic Weighted average common shares